Urgent request for cross-section SEMs

Mary Tang mtang at stanford.edu
Tue Dec 7 18:09:38 PST 2010


Dear stsetch users --

I am relaying an urgent request from Jim McVittie on behalf of the EE412 
etch teams for examples of undercut problems on STSetch1.   As you know, 
EE412 will be presenting profile results for stsetch2 tomorrow 
(Wednesday) afternoon.   They would really like a collection of SEM's 
for comparison and contrast.  Please email your pictures to Jim, cc'ed here.

Thanks!

Mary




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