From shott at stanford.edu Fri Feb 5 17:23:20 2010 From: shott at stanford.edu (John Shott) Date: Fri, 05 Feb 2010 17:23:20 -0800 Subject: Update .... stsetch. Message-ID: <4B6CC488.9060706@stanford.edu> stsetch community: As you likely know, the stsetch tool has been down for a long time with problems with it's helium backside control system that normally applies a controlled 10 Torr pressure of helium to the back of the wafer for better cooling. There are three main components to this system: the capacitance manometer that measures the pressure, the mass flow controller that controls the helium gas flow, and the controller that contains the electronic feedback that adjusts the helium flow to maintain proper pressure. In terms of likelihood of failure, I'd say that the MFC is most likely to fail, the capacitance manometer is next most likely, and the electronic controller would typically be the most reliable. After careful study of all components by Elmer, Cesar, and Jim Mcvittie, however, we finally concluded that we had a problem with the controller and arranged for a replacement. David Cala went to pick it up this afternoon. While it is supposed to be identical to the one that we already have, it has an additional connector labeled "Remote Control" and our system has no matching cable to connect to it. My guess is that we likely need a simple jumper to short a couple of pins together to get this to work on our system .... but as of this moment, we don't know which pins. We have contacted STS as well as folks at both Arizona State and Georgia Tech (that both have STS etchers of a similar vintage) to see if we can quickly learn what we need to do to this connector to make it work. We will also open the controller to see if we can easily figure that out by comparing the wiring in the old and new controllers. However, until we can figure that out, we don't have functional helium backside control. We will do what we can to see if that can be resolved over the weekend but, until that happens, we are still down. I will send out an update if we can resolve this over the weekend, John From chen0622 at yahoo.com Tue Feb 9 18:33:22 2010 From: chen0622 at yahoo.com (c.c.) Date: Tue, 9 Feb 2010 18:33:22 -0800 (PST) Subject: reservation released tomorrow 11:30 AM to 3:30 PM Message-ID: <844543.45943.qm@web56808.mail.re3.yahoo.com> An HTML attachment was scrubbed... URL: From chingmei at stanford.edu Tue Feb 16 12:51:04 2010 From: chingmei at stanford.edu (Ching-Mei Hsu) Date: Tue, 16 Feb 2010 12:51:04 -0800 (PST) Subject: sts2 free from 1:00 to 2:30 pm today Message-ID: <1035781632.767891266353464009.JavaMail.root@zm01.stanford.edu> Sorry about the late notice. switch to sts since sts is back -- Ching-Mei Hsu PhD Candidate Materials Science and Engineering Stanford University McCullough rm. 209 476 Lomita Mall Stanford, CA 94305 From chen0622 at yahoo.com Wed Feb 24 09:08:25 2010 From: chen0622 at yahoo.com (c.c.) Date: Wed, 24 Feb 2010 09:08:25 -0800 (PST) Subject: reservation released 10:00 AM to 2:00 PM today Message-ID: <823233.47519.qm@web56804.mail.re3.yahoo.com> An HTML attachment was scrubbed... URL: From chen0622 at yahoo.com Sun Feb 28 09:47:17 2010 From: chen0622 at yahoo.com (c.c.) Date: Sun, 28 Feb 2010 09:47:17 -0800 (PST) Subject: stsetch availalbe now till 11:30 AM, finished earlier Message-ID: <803576.47718.qm@web56803.mail.re3.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: