From bwchui at yahoo.com Thu May 6 00:43:23 2010 From: bwchui at yahoo.com (Benjamin Chui) Date: Thu, 6 May 2010 00:43:23 -0700 (PDT) Subject: STSetch available Thurs 1300-1700 Message-ID: <511028.33923.qm@web36507.mail.mud.yahoo.com> STSetch available Thurs 1300-1700 From dongrip at stanford.edu Thu May 6 14:06:16 2010 From: dongrip at stanford.edu (Dong Rip Kim) Date: Thu, 6 May 2010 14:06:16 -0700 (PDT) Subject: STSetch available now until 4pm In-Reply-To: <511028.33923.qm@web36507.mail.mud.yahoo.com> Message-ID: <1375998196.35231.1273179976287.JavaMail.root@zm02.stanford.edu> From chingmei at stanford.edu Thu May 6 20:52:14 2010 From: chingmei at stanford.edu (Ching-Mei Hsu) Date: Thu, 6 May 2010 20:52:14 -0700 (PDT) Subject: STS release from 11:30 am to 3:00 pm Message-ID: <177087003.38935.1273204334684.JavaMail.root@zm01.stanford.edu> Just notice reservation conflicts -- Ching-Mei Hsu PhD Candidate Materials Science and Engineering Stanford University McCullough rm. 209 476 Lomita Mall Stanford, CA 94305 From chingmei at stanford.edu Mon May 10 09:12:01 2010 From: chingmei at stanford.edu (Ching-Mei Hsu) Date: Mon, 10 May 2010 09:12:01 -0700 (PDT) Subject: reservation released from 9-11:30 am Message-ID: <1390221638.51474.1273507921624.JavaMail.root@zm01.stanford.edu> Sorry about the late notice. Sample is broken. -- Ching-Mei Hsu PhD Candidate Materials Science and Engineering Stanford University McCullough rm. 209 476 Lomita Mall Stanford, CA 94305 From mt.innovate at gmail.com Mon May 10 10:47:38 2010 From: mt.innovate at gmail.com (Mike Tan) Date: Mon, 10 May 2010 10:47:38 -0700 Subject: reservation released 12:00-1:30 Message-ID: From mt.innovate at gmail.com Mon May 10 18:30:43 2010 From: mt.innovate at gmail.com (Mike Tan) Date: Mon, 10 May 2010 18:30:43 -0700 Subject: 1am - 7am Tuesday slots released Message-ID: wafers not ready From bwchui at yahoo.com Tue May 11 16:17:50 2010 From: bwchui at yahoo.com (Benjamin Chui) Date: Tue, 11 May 2010 16:17:50 -0700 (PDT) Subject: STSetch available now till 8:30pm Message-ID: <718379.86684.qm@web36505.mail.mud.yahoo.com> I finished my etch earlier because another slot opened up. From bwchui at yahoo.com Fri May 14 13:36:07 2010 From: bwchui at yahoo.com (Benjamin Chui) Date: Fri, 14 May 2010 13:36:07 -0700 (PDT) Subject: Several reservations deleted over the weekend Message-ID: <39083.55814.qm@web36501.mail.mud.yahoo.com> Done early. Happy etching! Ben From mtang at stanford.edu Sun May 23 16:39:15 2010 From: mtang at stanford.edu (Mary Tang) Date: Sun, 23 May 2010 16:39:15 -0700 Subject: Honoring Reservations Message-ID: <4BF9BCA3.4060807@stanford.edu> Dear stsetch users -- There are several complaints -- which are confirmed by a looking at Coral -- that there is a lot of bad reservation behavior going on out there. STOP IT! You know who you are. The are 8 users who seem be using about 1/2 or less of the reservation times they are making. There are very few community emails about canceled or open reservations. And a few people are monopolizing the system. So: 1. Make reservations you intend to use. 2. If you can't use your reservation, email stsetch at snf as soon as you know, so that the time can be released. 3. If you are done before your reservation ends, delete your reservation or email stsetch at snf so they know it's available. Inputs on reservation policies would be appreciated. Please direct to Nancy and me. Thanks, Mary From dongrip at stanford.edu Mon May 24 11:53:08 2010 From: dongrip at stanford.edu (Dong Rip Kim) Date: Mon, 24 May 2010 11:53:08 -0700 Subject: reservation In-Reply-To: <4BF9BCA3.4060807@stanford.edu> References: <4BF9BCA3.4060807@stanford.edu> Message-ID: <820FA419-D2C6-48B5-88E9-A9648A88D387@stanford.edu> Hi STSetch users, Is there anybody who can give me one hour out of your reservation, if you don't need? I need short etch (~12 min) for a couple of wafers, and if you could give it to me, I'd very much appreciate it. Anytime should be fine. Thank you, Dong Rip From nlatta at stanford.edu Tue May 25 10:23:43 2010 From: nlatta at stanford.edu (Nancy Latta) Date: Tue, 25 May 2010 10:23:43 -0700 Subject: Removed 11:00-3:00 reservation for TODAY Message-ID: <4BFC079F.3030004@stanford.edu> Can't find wafers... From dongrip at stanford.edu Tue May 25 10:47:57 2010 From: dongrip at stanford.edu (Dong Rip Kim) Date: Tue, 25 May 2010 10:47:57 -0700 Subject: Removed 11:00-3:00 reservation for TODAY In-Reply-To: <4BFC079F.3030004@stanford.edu> References: <4BFC079F.3030004@stanford.edu> Message-ID: <7DB1AA44-72A0-48EE-9FBA-4B30F1B07054@stanford.edu> Taken, thanks! Dong Rip On May 25, 2010, at 10:23 AM, Nancy Latta wrote: > Can't find wafers... > From mt.innovate at gmail.com Tue May 25 12:01:28 2010 From: mt.innovate at gmail.com (Mike Tan) Date: Tue, 25 May 2010 12:01:28 -0700 Subject: reservation released Message-ID: Tuesday 3:30PM -12:30AM Friday 4:00am- 12:00pm Mike From rik9 at stanford.edu Tue May 25 18:13:30 2010 From: rik9 at stanford.edu (Rishi Kant) Date: Tue, 25 May 2010 18:13:30 -0700 (PDT) Subject: 11:30-1am released Message-ID: <1559742933.87709.1274836410126.JavaMail.root@zm06.stanford.edu> Wafer not ready due to litho From ywidjaja at stanfordalumni.org Tue May 25 19:01:14 2010 From: ywidjaja at stanfordalumni.org (Yuniarto Widjaja) Date: Tue, 25 May 2010 19:01:14 -0700 Subject: 1am-2am released Message-ID: <303oeZcao2838S06.1274839274@cmsweb06.cms.usa.net> Will only use part of the reservation because asml is down. Could anyone kindly give me 2x 1hr-block reservation in the next couple days? Thanks! ____________________________________________________________________ From xzhuang at stanford.edu Wed May 26 17:04:42 2010 From: xzhuang at stanford.edu (Steve Zhuang) Date: Wed, 26 May 2010 17:04:42 -0700 (PDT) Subject: STS open till 8:30 pm today Message-ID: <345157094.118181.1274918682241.JavaMail.root@zm02.stanford.edu> I cannot prepare my wafer for the etching in time. Sorry about the last minute notice. Steve Zhuang From zappe at cmu.edu Thu May 27 00:25:41 2010 From: zappe at cmu.edu (Stefan Zappe) Date: Thu, 27 May 2010 03:25:41 -0400 Subject: free tonight 4 AM - 8 AM Message-ID: <9832c0891dbeb6c4957f883b4e990bbb.squirrel@webmail.andrew.cmu.edu> found better time From chingmei at stanford.edu Thu May 27 20:30:27 2010 From: chingmei at stanford.edu (Ching-Mei Hsu) Date: Thu, 27 May 2010 20:30:27 -0700 (PDT) Subject: free 4am to 7 am Message-ID: <1721117753.496445.1275017427928.JavaMail.root@zm01.stanford.edu> May not be able to make it. sorry about the late notice. -- Ching-Mei Hsu PhD Candidate Materials Science and Engineering Stanford University McCullough rm. 209 476 Lomita Mall Stanford, CA 94305 From bwchui at yahoo.com Thu May 27 23:19:40 2010 From: bwchui at yahoo.com (Benjamin Chui) Date: Thu, 27 May 2010 23:19:40 -0700 (PDT) Subject: STSetch: Reservation released tonight (friday 0000-0400) Message-ID: <225967.74800.qm@web36502.mail.mud.yahoo.com> STS Reservation released tonight (friday 0000-0400) Sorry for the late notice. Ben From shott at stanford.edu Fri May 28 14:50:21 2010 From: shott at stanford.edu (John Shott) Date: Fri, 28 May 2010 14:50:21 -0700 Subject: STS Field Service Visit .... Message-ID: <4C003A9D.3000101@stanford.edu> STS Etch Community: We have just received notification from STS that we can expect field service to arrive mid-afternoon next Tuesday. We will have to see how much time they can spend on the tools that afternoon. Because we have issues on both tools that we would like them to work on, I've taken the liberty of reserving both tools during the day on Wednesday, Thursday, and Friday of next week. While work will likely be happening only on one machine at a time, some of that time may be released once we know more about which tool will be the Field Service target each day. We will try to keep you all posted as we learn more. Have a good weekend, John From jwpchen at stanford.edu Fri May 28 18:35:15 2010 From: jwpchen at stanford.edu (Peter Chen) Date: Fri, 28 May 2010 18:35:15 -0700 Subject: reservations released 930pm-2am, 4am-8am Message-ID: <4C006F53.4070803@stanford.edu> ASML is still down so I will have fewer wafers to etch. Slots now open from 930pm-8am. I still have 2hr reserved for my remaining wafers 2am-4am. Sorry for late notice. For once ASML is doing worse than stsetch... From jwpchen at stanford.edu Sun May 30 07:47:03 2010 From: jwpchen at stanford.edu (Peter Chen) Date: Sun, 30 May 2010 07:47:03 -0700 Subject: wafer broken in chamber Message-ID: <4C027A67.7070000@stanford.edu> My 1st wafer finished with no mishaps, but the 2nd identical wafer shattered in less than 1hr while using holder. Not sure if it is related to helium cooling. Helium pressure was 3.5-4.5 before wafer broke. I cannot see pieces in the o-ring area, but helium cooling pressure with a dummy wafer now reads negative. Some pieces are outside the chuck area. My sincere apologies... From chingmei at stanford.edu Mon May 31 20:14:11 2010 From: chingmei at stanford.edu (Ching-Mei Hsu) Date: Mon, 31 May 2010 20:14:11 -0700 (PDT) Subject: Tuesday(June 1st) 11:00am- 1pm free Message-ID: <1599838913.558476.1275362051739.JavaMail.root@zm01.stanford.edu> Sample preparation delayed -- Ching-Mei Hsu PhD Candidate Materials Science and Engineering Stanford University McCullough rm. 209 476 Lomita Mall Stanford, CA 94305