From xuanwu at stanford.edu  Mon Apr  4 13:57:12 2011
From: xuanwu at stanford.edu (Xuan Wu)
Date: Mon, 04 Apr 2011 13:57:12 -0700
Subject: highly selective DRIE
Message-ID: <4D9A30A8.9050204@stanford.edu>

Hi stsetch users,

Does anyone know of any stsetch recipes that has a higher Si:Ox 
selectivity than DEEP?  I'm not as concerned about the scallops in the 
sidewall.  I'm trying to stop on 0.5 um oxide, and was wondering how 
practical that is.

Thanks,
Xuan


From ylyang at stanford.edu  Mon Apr  4 16:16:21 2011
From: ylyang at stanford.edu (Yongliang Yang)
Date: Mon, 4 Apr 2011 16:16:21 -0700 (PDT)
Subject: stsetcher released 5:00PM-9:30PM today
In-Reply-To: <4D9A30A8.9050204@stanford.edu>
Message-ID: <1293239518.1114642.1301958981233.JavaMail.root@zm04.stanford.edu>

Started earlier and will finished earlier.

Best,
Yongliang


From ylyang at stanford.edu  Wed Apr 20 11:09:25 2011
From: ylyang at stanford.edu (Yongliang Yang)
Date: Wed, 20 Apr 2011 11:09:25 -0700 (PDT)
Subject: stsetch free 9:30AM - 1:30PM tomorrow
Message-ID: <691636629.604198.1303322965456.JavaMail.root@zm04.stanford.edu>



Best,
Yongliang


From jazz9152 at slac.stanford.edu  Thu Apr 28 10:05:40 2011
From: jazz9152 at slac.stanford.edu (Jasmine Hasi)
Date: Thu, 28 Apr 2011 10:05:40 -0700 (PDT)
Subject: sts free from 10.30- 2pm
Message-ID: <Pine.SOC.4.64.1104281004530.29723@flora01.slac.stanford.edu>


sts free from 10.30- 2pm


Jasmine