highly selective DRIE

Xuan Wu xuanwu at stanford.edu
Mon Apr 4 13:57:12 PDT 2011


Hi stsetch users,

Does anyone know of any stsetch recipes that has a higher Si:Ox 
selectivity than DEEP?  I'm not as concerned about the scallops in the 
sidewall.  I'm trying to stop on 0.5 um oxide, and was wondering how 
practical that is.

Thanks,
Xuan



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