From insun at stanford.edu  Wed Oct  5 13:06:47 2011
From: insun at stanford.edu (Insun Park)
Date: Wed, 5 Oct 2011 13:06:47 -0700
Subject: sts free 4-8pm today
Message-ID: <CAFUs8na5R2Wm_RcsYfq_G0RmYQY7qX6q43U-eym9-ULMv2hfsA@mail.gmail.com>

Hi all

I released STS time slot (4-8pm) today.
Sorry for late notice.

Insun
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From insun at stanford.edu  Wed Oct  5 13:09:54 2011
From: insun at stanford.edu (Insun Park)
Date: Wed, 5 Oct 2011 13:09:54 -0700
Subject: sts free 4-8pm today
Message-ID: <CAFUs8nYrV7Gx3xhL8nTq6_uc2HWdzG37grRP1DOrO9OHpn2CSg@mail.gmail.com>

Hi all

I released STS time slot (4-8pm) today.
Sorry for late notice.

Insun
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From insun at stanford.edu  Fri Oct  7 01:26:22 2011
From: insun at stanford.edu (Insun Park)
Date: Fri, 7 Oct 2011 01:26:22 -0700
Subject: Today(Oct 7) 9:30am-1:30pm time slot released
Message-ID: <CAFUs8nZC7u8nJT03NdRdSHOOohAB82_Q6KC1DmPHzan0Bj4YJw@mail.gmail.com>


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From nharjee at stanford.edu  Tue Oct 11 21:03:55 2011
From: nharjee at stanford.edu (Nahid Harjee)
Date: Tue, 11 Oct 2011 21:03:55 -0700
Subject: Released tonight 10:30p-12:00a
Message-ID: <CAC9hAncO1CWdDrqdxe5NGzAj4701ixQMPjvGPgBH_-YE5ecnsA@mail.gmail.com>


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From bwchui at yahoo.com  Mon Oct 17 15:55:17 2011
From: bwchui at yahoo.com (Benjamin Chui)
Date: Mon, 17 Oct 2011 15:55:17 -0700 (PDT)
Subject: STSetch reservation released today 1700-2100
Message-ID: <1318892117.17344.YahooMailNeo@web36505.mail.mud.yahoo.com>

STSetch reservation released today 1700-2100


Happy etching!
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From ehsans at stanford.edu  Thu Oct 20 23:03:06 2011
From: ehsans at stanford.edu (Ehsan Sadeghipour)
Date: Thu, 20 Oct 2011 23:03:06 -0700
Subject: STS Free Tomorrow 8 am to noon
Message-ID: <CAPx=s18YDOkE4OncuHktqar-hQKQbgj4YcE-AJQZTnnNErp9LA@mail.gmail.com>


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From scrippen at stanford.edu  Fri Oct 21 08:24:28 2011
From: scrippen at stanford.edu (Shane Crippen)
Date: Fri, 21 Oct 2011 08:24:28 -0700
Subject: stsetch released 8-10pm Friday
Message-ID: <004201cc9005$866cb850$934628f0$@edu>

 

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From lelewang at stanford.edu  Wed Oct 26 19:17:49 2011
From: lelewang at stanford.edu (Lele Wang)
Date: Wed, 26 Oct 2011 19:17:49 -0700 (PDT)
Subject: Notching problem of SOI wafer
In-Reply-To: <CAPx=s18YDOkE4OncuHktqar-hQKQbgj4YcE-AJQZTnnNErp9LA@mail.gmail.com>
Message-ID: <1817449165.1342656.1319681869859.JavaMail.root@zm01.stanford.edu>

Dear STSetcher users,
I have a serious notching problem on etching of SOI wafers in STS1. The overetch is not much, about 20% but the lateral etch at the bottom of trench (on the silicon and buried oxide interface) is very serious. Did you ever have this problem and how did you solve this? Thanks.


Best,
Lele Wang