Notching problem of SOI wafer

Lele Wang lelewang at stanford.edu
Wed Oct 26 19:17:49 PDT 2011


Dear STSetcher users,
I have a serious notching problem on etching of SOI wafers in STS1. The overetch is not much, about 20% but the lateral etch at the bottom of trench (on the silicon and buried oxide interface) is very serious. Did you ever have this problem and how did you solve this? Thanks.


Best,
Lele Wang




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