No Freon 318

Mary Tang mtang at
Tue Jun 26 14:05:39 PDT 2012

Dear stsetch/2/drytek4 users --

The replacement cylinder of C4F8 is due Wednesday, Thursday at the 
latest.  We apologize for the inconvenience and are working to address 
the problems.

Team Etch

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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