No Freon 318

Mary Tang mtang at stanford.edu
Tue Jun 26 14:05:39 PDT 2012


Dear stsetch/2/drytek4 users --

The replacement cylinder of C4F8 is due Wednesday, Thursday at the 
latest.  We apologize for the inconvenience and are working to address 
the problems.

Team Etch

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




More information about the stsetch mailing list