From chen0622 at yahoo.com Thu Nov 1 06:13:13 2012 From: chen0622 at yahoo.com (Chih-Chang Chen) Date: Thu, 1 Nov 2012 06:13:13 -0700 (PDT) Subject: STS etcher time released today from 9:00 AM Message-ID: <1351775593.21428.YahooMailNeo@web122405.mail.ne1.yahoo.com> Sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From minchieh at stanford.edu Wed Nov 7 14:45:21 2012 From: minchieh at stanford.edu (Min-Chieh Ho) Date: Wed, 7 Nov 2012 14:45:21 -0800 (PST) Subject: reservation tomorrow morning released Message-ID: <747450911.6332528.1352328321367.JavaMail.root@stanford.edu> Should be able to finish today. Min-Chieh -------------- next part -------------- An HTML attachment was scrubbed... URL: From paulyoon at stanford.edu Thu Nov 8 10:28:59 2012 From: paulyoon at stanford.edu (paulyoon) Date: Thu, 8 Nov 2012 10:28:59 -0800 Subject: reservation released 12:00~14:00 In-Reply-To: <747450911.6332528.1352328321367.JavaMail.root@stanford.edu> References: <747450911.6332528.1352328321367.JavaMail.root@stanford.edu> Message-ID: <018a01cdbdde$ec4c38a0$c4e4a9e0$@edu> Sorry for late notice. -Paul Yoon -------------- next part -------------- An HTML attachment was scrubbed... URL: From chen0622 at yahoo.com Thu Nov 8 10:56:47 2012 From: chen0622 at yahoo.com (Chih-Chang Chen) Date: Thu, 8 Nov 2012 10:56:47 -0800 (PST) Subject: sts1 etcher reservation released tomorrow 9:00 AM to 11:30 AM Message-ID: <1352401007.53284.YahooMailNeo@web122406.mail.ne1.yahoo.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: From taotang at stanford.edu Fri Nov 9 11:20:59 2012 From: taotang at stanford.edu (Tao Tang) Date: Fri, 9 Nov 2012 11:20:59 -0800 (PST) Subject: STSETCH released 12:00-15:00 today In-Reply-To: <634857227.13099590.1352488802688.JavaMail.root@stanford.edu> Message-ID: <1280398443.13103106.1352488859771.JavaMail.root@stanford.edu> Sorry for late notice. -Tao Tang From edmyers at stanford.edu Mon Nov 12 12:46:59 2012 From: edmyers at stanford.edu (Ed Myers) Date: Mon, 12 Nov 2012 12:46:59 -0800 Subject: PlasmaTherm DRIE Discussion Message-ID: <50A16043.3060101@stanford.edu> All, I would like to meet at 10am on Wednesday, Nov. 14th in 317 Spilker to discuss the PlasmaTherm DRIE system. As many of you know the PlasmaTherm DRIE system has completed it's acceptance. This means, it is now available for process characterization. I would like to meet with the DRIE community to discuss the process needs for the PlasmaTherm system. Please come to discuss your process challenges on the STS systems and what needs to happen on the PlasmaTherm system. If you know anyone who needs DRIE etching, but have not been able to on the STS systems, please make sure they are invited. Regards, Ed From rthowe at stanford.edu Mon Nov 12 13:19:53 2012 From: rthowe at stanford.edu (Roger T. Howe) Date: Mon, 12 Nov 2012 13:19:53 -0800 Subject: PlasmaTherm DRIE Discussion In-Reply-To: <50A16043.3060101@stanford.edu> References: <50A16043.3060101@stanford.edu> Message-ID: <50A167F9.9000209@stanford.edu> Ed, It's great that this is moving forward. Hope everyone can attend. Roger On 11/12/12 12:46 PM, Ed Myers wrote: > All, > > I would like to meet at 10am on Wednesday, Nov. 14th in 317 Spilker to > discuss the PlasmaTherm DRIE system. As many of you know the > PlasmaTherm DRIE system has completed it's acceptance. This means, it > is now available for process characterization. I would like to meet > with the DRIE community to discuss the process needs for the > PlasmaTherm system. > > Please come to discuss your process challenges on the STS systems and > what needs to happen on the PlasmaTherm system. If you know anyone > who needs DRIE etching, but have not been able to on the STS systems, > please make sure they are invited. > > Regards, > Ed From edmyers at stanford.edu Wed Nov 14 14:03:21 2012 From: edmyers at stanford.edu (Ed Myers) Date: Wed, 14 Nov 2012 14:03:21 -0800 Subject: PlasmaTherm DRIE Discussion Minutes 11/14/12 Message-ID: <50A41529.2050101@stanford.edu> All, Here are my notes from today's DRIE discussion. Please let me know if I missed anything. As mentioned during the meeting, the items brought up fall in to two categories. One category relates to policy and the other relates to capability. These are not rank ordered, but are listed in roughly the order they were presented. Policy Related: 1) Gold Contaminated DRIE capability 2) Use of metal hard masks 3) Clearer policy on the use of Crystalbond 4) Ge DRIE etch policy 5) Use of the wafer carrier and protection ring in STSetch2 and PT-DSE Process Capability: 1) High Aspect / Deep Via: 2-20um through wafer etches 2) Verticle Sidewalls: Seeing 70-80 degree slopes on STSetch when etching through a handle wafer 3) No SOI footing: Seeing problems with SOI footing on STSetch 4) No Grassing: Seeing more frequent and random grassing on STSetch 5) No CD expansion: 20um holes become 26um holes during a through wafer etch (STSetch) 6) Reliable sidewall slops: Seeing a lot of variation in profile angles with time (STSetch) 7) Smooth sidewalls: Scalloping of less than 10nm for 100um deep etches 8) Better resist selectivity: Seeing poor selectivity on STSetch2 Action Items: 1) Ed to post the acceptance reports on the wiki 2) Interested lab members to contact Ed to volunteer for recipe development. Commitments: 1) All the new etch systems are available to lab members willing to help develop etch recipes, with the following caveats: A) The recipe development objective must be pre-approved by Ed. B) All results must be shared, by posting on the lab member's wiki. C) No more than 3 runs will be allowed, unless there are published results. D) The Oxford III-V must complete acceptance before it becomes available to lab members for recipe development. E) The correct Operator/Engineer/Maintenance levels and passwords must be established on the tool. Regards, Ed From minchieh at stanford.edu Thu Nov 15 12:38:23 2012 From: minchieh at stanford.edu (Min-Chieh Ho) Date: Thu, 15 Nov 2012 12:38:23 -0800 (PST) Subject: Friday 12:30 - 4:30pm released Message-ID: <1828992844.12449131.1353011903193.JavaMail.root@stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From jasonlin at stanford.edu Fri Nov 16 02:12:04 2012 From: jasonlin at stanford.edu (J. Jason Lin) Date: Fri, 16 Nov 2012 02:12:04 -0800 Subject: stsetch released 4:30pm - 9:30pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From popomoo at stanford.edu Fri Nov 16 23:03:49 2012 From: popomoo at stanford.edu (Sangmoo Jeong) Date: Fri, 16 Nov 2012 23:03:49 -0800 (PST) Subject: stsetch free tomorrow 9am~1pm Message-ID: <652897806.33440388.1353135829076.JavaMail.root@stanford.edu> upstream process has some problems. From paulyoon at stanford.edu Tue Nov 20 17:14:20 2012 From: paulyoon at stanford.edu (paulyoon) Date: Tue, 20 Nov 2012 17:14:20 -0800 Subject: stsetch2 free 6:30pm to 8:00pm In-Reply-To: <652897806.33440388.1353135829076.JavaMail.root@stanford.edu> References: <652897806.33440388.1353135829076.JavaMail.root@stanford.edu> Message-ID: <002d01cdc785$895e7860$9c1b6920$@edu> Sample not ready.