PlasmaTherm DRIE Discussion
Roger T. Howe
rthowe at stanford.edu
Mon Nov 12 13:19:53 PST 2012
It's great that this is moving forward. Hope everyone can attend.
On 11/12/12 12:46 PM, Ed Myers wrote:
> I would like to meet at 10am on Wednesday, Nov. 14th in 317 Spilker to
> discuss the PlasmaTherm DRIE system. As many of you know the
> PlasmaTherm DRIE system has completed it's acceptance. This means, it
> is now available for process characterization. I would like to meet
> with the DRIE community to discuss the process needs for the
> PlasmaTherm system.
> Please come to discuss your process challenges on the STS systems and
> what needs to happen on the PlasmaTherm system. If you know anyone
> who needs DRIE etching, but have not been able to on the STS systems,
> please make sure they are invited.
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