From bwchui at yahoo.com  Wed Sep 12 15:16:34 2012
From: bwchui at yahoo.com (Benjamin Chui)
Date: Wed, 12 Sep 2012 15:16:34 -0700 (PDT)
Subject: STSetch available 1600-1900
Message-ID: <1347488194.56940.YahooMailNeo@web160501.mail.bf1.yahoo.com>

STSetch available 1600-1900
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From mt.innovate at gmail.com  Fri Sep 14 09:58:26 2012
From: mt.innovate at gmail.com (Mike Tan)
Date: Fri, 14 Sep 2012 09:58:26 -0700
Subject: reservation released from 3:00-7pm
Message-ID: <CAOFHrLH9Ph7LiW9X-6L-YmKnSTsbHEC3vnVeAHbPV5DH_E-YYg@mail.gmail.com>

Mike
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From tasyurek at stanford.edu  Sun Sep 16 10:52:03 2012
From: tasyurek at stanford.edu (Emel Tasyurek)
Date: Sun, 16 Sep 2012 10:52:03 -0700 (PDT)
Subject: stsetch released tomorrow 2:30-5:30pm
Message-ID: <490503656.92556947.1347817923707.JavaMail.root@zm02.stanford.edu>



From pradeep.nataraj at gmail.com  Sun Sep 16 19:54:56 2012
From: pradeep.nataraj at gmail.com (Pradeep Nataraj)
Date: Sun, 16 Sep 2012 19:54:56 -0700
Subject: Cu processing in STSEtch1
Message-ID: <CAEhDSuan8W8tBh31XvmBSHcgGraVsjJcX69ZGaxc=bQzRoJ7PQ@mail.gmail.com>

Guys,

I saw Cu wafers lying around next to the tool and I am not very sure that
it got etched in the STS etcher 1.
I did noticed on the wafer etched in stsetch1 with Cu on the back side.

Please do know that Cu inside the clean or semi clean tool is *STRICTLY NOT
ALLOWED.*

Please make sure that you are not etching any wafers which has Cu on them.
If you need help,please ask staff for other tools.

Thank you.
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From npapte at stanford.edu  Sun Sep 16 20:15:04 2012
From: npapte at stanford.edu (Nikhil Apte)
Date: Sun, 16 Sep 2012 20:15:04 -0700
Subject: Cu processing in STSEtch1
In-Reply-To: <CAEhDSuan8W8tBh31XvmBSHcgGraVsjJcX69ZGaxc=bQzRoJ7PQ@mail.gmail.com>
References: <CAEhDSuan8W8tBh31XvmBSHcgGraVsjJcX69ZGaxc=bQzRoJ7PQ@mail.gmail.com>
Message-ID: <CAHqdPi1yyWK12=ujV_hBV_P=nF0+CvP9he8rm_rk5EAPMXiGwQ@mail.gmail.com>

Hi Pradeep,

You might be referring to my wafer. *The wafers don't have any copper on
them!!!* The back side has aluminum, which is covered with resist. The
resist on Al gives it a copper like look.

Thanks,
Nikhil


On Sun, Sep 16, 2012 at 7:54 PM, Pradeep Nataraj
<pradeep.nataraj at gmail.com>wrote:

> Guys,
>
> I saw Cu wafers lying around next to the tool and I am not very sure that
> it got etched in the STS etcher 1.
> I did noticed on the wafer etched in stsetch1 with Cu on the back side.
>
> Please do know that Cu inside the clean or semi clean tool is *STRICTLY
> NOT ALLOWED.*
>
> Please make sure that you are not etching any wafers which has Cu on them.
> If you need help,please ask staff for other tools.
>
> Thank you.
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From pradeep.nataraj at gmail.com  Sun Sep 16 20:39:26 2012
From: pradeep.nataraj at gmail.com (Pradeep Nataraj)
Date: Sun, 16 Sep 2012 20:39:26 -0700
Subject: Cu processing in STSEtch1
In-Reply-To: <CAHqdPi1yyWK12=ujV_hBV_P=nF0+CvP9he8rm_rk5EAPMXiGwQ@mail.gmail.com>
References: <CAEhDSuan8W8tBh31XvmBSHcgGraVsjJcX69ZGaxc=bQzRoJ7PQ@mail.gmail.com> <CAHqdPi1yyWK12=ujV_hBV_P=nF0+CvP9he8rm_rk5EAPMXiGwQ@mail.gmail.com>
Message-ID: <7B25F75C-59B4-40CC-A550-9B6878C0725B@gmail.com>

Nikhil. 
Sounds good. I was just making sure. 
Thanks for letting us know. 
Pradeep 



On Sep 16, 2012, at 8:15 PM, Nikhil Apte <npapte at stanford.edu> wrote:

Hi Pradeep,

You might be referring to my wafer. The wafers don't have any copper on them!!! The back side has aluminum, which is covered with resist. The resist on Al gives it a copper like look. 

Thanks,
Nikhil


On Sun, Sep 16, 2012 at 7:54 PM, Pradeep Nataraj <pradeep.nataraj at gmail.com> wrote:
Guys,

I saw Cu wafers lying around next to the tool and I am not very sure that it got etched in the STS etcher 1.
I did noticed on the wafer etched in stsetch1 with Cu on the back side.

Please do know that Cu inside the clean or semi clean tool is STRICTLY NOT ALLOWED.

Please make sure that you are not etching any wafers which has Cu on them.
If you need help,please ask staff for other tools.

Thank you.

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From mtang at stanford.edu  Mon Sep 17 07:58:54 2012
From: mtang at stanford.edu (Mary Tang)
Date: Mon, 17 Sep 2012 07:58:54 -0700
Subject: Fwd: Copper wafers Etched?
In-Reply-To: <CAEhDSubEXg7-gUFN4s=5ZRTH62KCLHDbuyGrPiqKa3N=j=xD+g@mail.gmail.com>
References: <CAEhDSubEXg7-gUFN4s=5ZRTH62KCLHDbuyGrPiqKa3N=j=xD+g@mail.gmail.com>
Message-ID: <50573AAE.608@stanford.edu>




-------- Original Message --------
Subject: 	Copper wafers Etched?
Date: 	Sun, 16 Sep 2012 16:57:34 -0700
From: 	Pradeep Nataraj <pradeep.nataraj at gmail.com>
To: 	stsetc at snf.stanford.edu
CC: 	Mary Tang <mtang at stanford.edu>, "Brett E. Huff" <bhuff at stanford.edu>



Guys,

I saw Cu wafers lying around next to the tool and I am not very sure that
it got etched in the STS etcher 1.
I did noticed on the wafer etched in stsetch1 with Cu on the back side.

Please do know that Cu inside the clean or semi clean tool is *STRICTLY NOT
ALLOWED.*

Please make sure that you are not etching any wafers which has Cu on them.
If you need help,please ask staff for other tools.

Thank you.
Pradeep




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From npapte at stanford.edu  Mon Sep 17 08:14:38 2012
From: npapte at stanford.edu (Nikhil Apte)
Date: Mon, 17 Sep 2012 08:14:38 -0700
Subject: Copper wafers Etched?
In-Reply-To: <50573AAE.608@stanford.edu>
References: <CAEhDSubEXg7-gUFN4s=5ZRTH62KCLHDbuyGrPiqKa3N=j=xD+g@mail.gmail.com>
	<50573AAE.608@stanford.edu>
Message-ID: <CAHqdPi3y2H7DK4-tY2TdQcxqseski-XM4GVBS3_drqBjy_VS0A@mail.gmail.com>

Hi Mary,

I think I replied to this already. This is *not a copper wafer*. The wafer
has aluminum on the backside which is covered with photoresist.

Thanks,
Nikhil


On Mon, Sep 17, 2012 at 7:58 AM, Mary Tang <mtang at stanford.edu> wrote:

>
>
>
> -------- Original Message --------  Subject: Copper wafers Etched?  Date: Sun,
> 16 Sep 2012 16:57:34 -0700  From: Pradeep Nataraj
> <pradeep.nataraj at gmail.com> <pradeep.nataraj at gmail.com>  To:
> stsetc at snf.stanford.edu  CC: Mary Tang <mtang at stanford.edu><mtang at stanford.edu>,
> "Brett E. Huff" <bhuff at stanford.edu> <bhuff at stanford.edu>
>
> Guys,
>
> I saw Cu wafers lying around next to the tool and I am not very sure that
> it got etched in the STS etcher 1.
> I did noticed on the wafer etched in stsetch1 with Cu on the back side.
>
> Please do know that Cu inside the clean or semi clean tool is *STRICTLY NOT
> ALLOWED.*
>
> Please make sure that you are not etching any wafers which has Cu on them.
> If you need help,please ask staff for other tools.
>
> Thank you.
> Pradeep
>
>
>
>
>
>
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From chen0622 at yahoo.com  Tue Sep 18 11:45:47 2012
From: chen0622 at yahoo.com (Chih-Chang Chen)
Date: Tue, 18 Sep 2012 11:45:47 -0700 (PDT)
Subject: reservation released Sept. 19,  9:00 AM to 13:00 PM
Message-ID: <1347993947.20028.YahooMailNeo@web122402.mail.ne1.yahoo.com>


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From chen0622 at yahoo.com  Wed Sep 19 06:07:49 2012
From: chen0622 at yahoo.com (Chih-Chang Chen)
Date: Wed, 19 Sep 2012 06:07:49 -0700 (PDT)
Subject: stsetch reservation released from 9:30 AM to 12:30 today
Message-ID: <1348060069.29746.YahooMailNeo@web122402.mail.ne1.yahoo.com>

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From chen0622 at yahoo.com  Wed Sep 19 08:14:50 2012
From: chen0622 at yahoo.com (Chih-Chang Chen)
Date: Wed, 19 Sep 2012 08:14:50 -0700 (PDT)
Subject: reservation released today from 9:30 AM to 1:30 PM
Message-ID: <1348067690.32787.YahooMailNeo@web122401.mail.ne1.yahoo.com>


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From chen0622 at yahoo.com  Wed Sep 19 18:12:41 2012
From: chen0622 at yahoo.com (Chih-Chang Chen)
Date: Wed, 19 Sep 2012 18:12:41 -0700 (PDT)
Subject: reservation released Thursday 9:00 AM to 12:00  PM
Message-ID: <1348103561.28297.YahooMailNeo@web122403.mail.ne1.yahoo.com>

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