Cu processing in STSEtch1

Pradeep Nataraj pradeep.nataraj at gmail.com
Sun Sep 16 19:54:56 PDT 2012


Guys,

I saw Cu wafers lying around next to the tool and I am not very sure that
it got etched in the STS etcher 1.
I did noticed on the wafer etched in stsetch1 with Cu on the back side.

Please do know that Cu inside the clean or semi clean tool is *STRICTLY NOT
ALLOWED.*

Please make sure that you are not etching any wafers which has Cu on them.
If you need help,please ask staff for other tools.

Thank you.
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