Cu processing in STSEtch1

Nikhil Apte npapte at stanford.edu
Sun Sep 16 20:15:04 PDT 2012


Hi Pradeep,

You might be referring to my wafer. *The wafers don't have any copper on
them!!!* The back side has aluminum, which is covered with resist. The
resist on Al gives it a copper like look.

Thanks,
Nikhil


On Sun, Sep 16, 2012 at 7:54 PM, Pradeep Nataraj
<pradeep.nataraj at gmail.com>wrote:

> Guys,
>
> I saw Cu wafers lying around next to the tool and I am not very sure that
> it got etched in the STS etcher 1.
> I did noticed on the wafer etched in stsetch1 with Cu on the back side.
>
> Please do know that Cu inside the clean or semi clean tool is *STRICTLY
> NOT ALLOWED.*
>
> Please make sure that you are not etching any wafers which has Cu on them.
> If you need help,please ask staff for other tools.
>
> Thank you.
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