Cu processing in STSEtch1

Pradeep Nataraj pradeep.nataraj at gmail.com
Sun Sep 16 20:39:26 PDT 2012


Nikhil. 
Sounds good. I was just making sure. 
Thanks for letting us know. 
Pradeep 



On Sep 16, 2012, at 8:15 PM, Nikhil Apte <npapte at stanford.edu> wrote:

Hi Pradeep,

You might be referring to my wafer. The wafers don't have any copper on them!!! The back side has aluminum, which is covered with resist. The resist on Al gives it a copper like look. 

Thanks,
Nikhil


On Sun, Sep 16, 2012 at 7:54 PM, Pradeep Nataraj <pradeep.nataraj at gmail.com> wrote:
Guys,

I saw Cu wafers lying around next to the tool and I am not very sure that it got etched in the STS etcher 1.
I did noticed on the wafer etched in stsetch1 with Cu on the back side.

Please do know that Cu inside the clean or semi clean tool is STRICTLY NOT ALLOWED.

Please make sure that you are not etching any wafers which has Cu on them.
If you need help,please ask staff for other tools.

Thank you.

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