Fwd: Copper wafers Etched?

Mary Tang mtang at stanford.edu
Mon Sep 17 07:58:54 PDT 2012




-------- Original Message --------
Subject: 	Copper wafers Etched?
Date: 	Sun, 16 Sep 2012 16:57:34 -0700
From: 	Pradeep Nataraj <pradeep.nataraj at gmail.com>
To: 	stsetc at snf.stanford.edu
CC: 	Mary Tang <mtang at stanford.edu>, "Brett E. Huff" <bhuff at stanford.edu>



Guys,

I saw Cu wafers lying around next to the tool and I am not very sure that
it got etched in the STS etcher 1.
I did noticed on the wafer etched in stsetch1 with Cu on the back side.

Please do know that Cu inside the clean or semi clean tool is *STRICTLY NOT
ALLOWED.*

Please make sure that you are not etching any wafers which has Cu on them.
If you need help,please ask staff for other tools.

Thank you.
Pradeep




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