Copper wafers Etched?
npapte at stanford.edu
Mon Sep 17 08:14:38 PDT 2012
I think I replied to this already. This is *not a copper wafer*. The wafer
has aluminum on the backside which is covered with photoresist.
On Mon, Sep 17, 2012 at 7:58 AM, Mary Tang <mtang at stanford.edu> wrote:
> -------- Original Message -------- Subject: Copper wafers Etched? Date: Sun,
> 16 Sep 2012 16:57:34 -0700 From: Pradeep Nataraj
> <pradeep.nataraj at gmail.com> <pradeep.nataraj at gmail.com> To:
> stsetc at snf.stanford.edu CC: Mary Tang <mtang at stanford.edu><mtang at stanford.edu>,
> "Brett E. Huff" <bhuff at stanford.edu> <bhuff at stanford.edu>
> I saw Cu wafers lying around next to the tool and I am not very sure that
> it got etched in the STS etcher 1.
> I did noticed on the wafer etched in stsetch1 with Cu on the back side.
> Please do know that Cu inside the clean or semi clean tool is *STRICTLY NOT
> Please make sure that you are not etching any wafers which has Cu on them.
> If you need help,please ask staff for other tools.
> Thank you.
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