Copper wafers Etched?

Nikhil Apte npapte at stanford.edu
Mon Sep 17 08:14:38 PDT 2012


Hi Mary,

I think I replied to this already. This is *not a copper wafer*. The wafer
has aluminum on the backside which is covered with photoresist.

Thanks,
Nikhil


On Mon, Sep 17, 2012 at 7:58 AM, Mary Tang <mtang at stanford.edu> wrote:

>
>
>
> -------- Original Message --------  Subject: Copper wafers Etched?  Date: Sun,
> 16 Sep 2012 16:57:34 -0700  From: Pradeep Nataraj
> <pradeep.nataraj at gmail.com> <pradeep.nataraj at gmail.com>  To:
> stsetc at snf.stanford.edu  CC: Mary Tang <mtang at stanford.edu><mtang at stanford.edu>,
> "Brett E. Huff" <bhuff at stanford.edu> <bhuff at stanford.edu>
>
> Guys,
>
> I saw Cu wafers lying around next to the tool and I am not very sure that
> it got etched in the STS etcher 1.
> I did noticed on the wafer etched in stsetch1 with Cu on the back side.
>
> Please do know that Cu inside the clean or semi clean tool is *STRICTLY NOT
> ALLOWED.*
>
> Please make sure that you are not etching any wafers which has Cu on them.
> If you need help,please ask staff for other tools.
>
> Thank you.
> Pradeep
>
>
>
>
>
>
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