Problem stsetch2 SNF 2005-08-18 13:55:08: Can't start recipe

cbellew at snf.stanford.edu cbellew at snf.stanford.edu
Thu Aug 18 13:55:10 PDT 2005


I tried to run the smooth shallow recipe in automatic mode.
It says sequence started but the load lock is not venting.
I was able to vent and pump the carousel manually.




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