Problem stsetch2 SNF 2005-08-18 13:55:08: Can't start recipe

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Aug 18 16:10:01 PDT 2005

Previous message: Problem stsetch2 SNF 2005-08-18 13:55:08: Can't start recipe
Next message: Shutdown stsetch2 SNF 2005-08-19 17:16:26: Main pump dead
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Pumped the process chamber to base pressure and ran the users recipe in Auto with no problems.

Previous message: Problem stsetch2 SNF 2005-08-18 13:55:08: Can't start recipe
Next message: Shutdown stsetch2 SNF 2005-08-19 17:16:26: Main pump dead
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch2-pcs mailing list