Shutdown stsetch2 SNF 2005-12-09 09:18:01: wafer piece in the etch chamber
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Dec 9 15:40:13 PST 2005
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Shutdown stsetch2 SNF 2005-12-09 09:18:01: wafer piece in the etch chamber
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Cleaned chamber. Ran O2 clean.
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Shutdown stsetch2 SNF 2005-12-09 09:18:01: wafer piece in the etch chamber
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Problem stsetch2 SNF 2005-12-16 03:07:13: recipe start error
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