Problem stsetch2 SNF 2005-12-16 03:07:13: recipe start error

tag at snf.stanford.edu tag at snf.stanford.edu
Fri Dec 16 03:07:14 PST 2005


When starting recipe, leak check error occurs and message says the substrate is not clamped. (red error message)
When unloading, the wafer comes out tilted on chuck. 




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