From eenriquez at snf.stanford.edu  Mon Jan  3 16:06:45 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 3 Jan 2005 16:06:45 -0800
Subject: Comment stsetch2 SNF 2005-01-03 16:06:44: Work done during shutdown
Message-ID: <mailman.0.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

Upgraded software to version 3.0.  Need to re-enter all necessary recipes.  Currently having a problem with the loadlock handler.  



From amyers at snf.stanford.edu  Fri Jan  7 21:41:24 2005
From: amyers at snf.stanford.edu (amyers at snf.stanford.edu)
Date: Fri, 7 Jan 2005 21:41:24 -0800
Subject: Problem stsetch2 SNF 2005-01-07 21:41:24: etch rate low (half) and lots of grass with 
Message-ID: <mailman.1.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

the high aspect ratio recipe



From eenriquez at snf.stanford.edu  Thu Jan 13 15:56:54 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 13 Jan 2005 15:56:54 -0800
Subject: Problem stsetch2 SNF 2005-01-07 21:41:24: etch rate low (half) and lots of grass with 
Message-ID: <mailman.2.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

The Shallow recipe had low selectity also.  Replaced the SF6 mfc.



From amyers at snf.stanford.edu  Fri Jan 14 09:48:30 2005
From: amyers at snf.stanford.edu (amyers at snf.stanford.edu)
Date: Fri, 14 Jan 2005 09:48:30 -0800
Subject: Problem stsetch2 SNF 2005-01-14 09:48:29: didn't retrieve dummy from chamber
Message-ID: <mailman.3.1356283383.4670.stsetch2-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Thu Jan 20 07:47:36 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 20 Jan 2005 07:47:36 -0800
Subject: Problem stsetch2 SNF 2005-01-14 09:48:29: didn't retrieve dummy from chamber
Message-ID: <mailman.4.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

Retrieved wafer from chamber and ran the lip seal conditioning recipe 3X.



From eenriquez at snf.stanford.edu  Thu Jan 20 07:47:53 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 20 Jan 2005 07:47:53 -0800
Subject: Comment stsetch2 SNF 2005-01-03 16:06:44: Work done during shutdown
Message-ID: <mailman.5.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

OK



From eenriquez at snf.stanford.edu  Thu Jan 20 07:49:19 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 20 Jan 2005 07:49:19 -0800
Subject: Problem stsetch2 SNF 2005-01-20 07:49:19: Low etch rate and "grass" on wafer
Message-ID: <mailman.6.1356283383.4670.stsetch2-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Thu Jan 20 16:11:22 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 20 Jan 2005 16:11:22 -0800
Subject: Problem stsetch2 SNF 2005-01-20 07:49:19: Low etch rate and "grass" on wafer
Message-ID: <mailman.7.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

Disabled the "range switchable" option in the configuration page.