Problem stsetch2 SNF 2005-01-07 21:41:24: etch rate low (half) and lots of grass with
amyers at snf.stanford.edu
amyers at snf.stanford.edu
Fri Jan 7 21:41:24 PST 2005
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Comment stsetch2 SNF 2005-01-03 16:06:44: Work done during shutdown
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Problem stsetch2 SNF 2005-01-07 21:41:24: etch rate low (half) and lots of grass with
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the high aspect ratio recipe
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Comment stsetch2 SNF 2005-01-03 16:06:44: Work done during shutdown
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Problem stsetch2 SNF 2005-01-07 21:41:24: etch rate low (half) and lots of grass with
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