Problem stsetch2 SNF 2005-01-20 07:49:19: Low etch rate and "grass" on wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Jan 20 07:49:19 PST 2005
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Problem stsetch2 SNF 2005-01-14 09:48:29: didn't retrieve dummy from chamber
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Problem stsetch2 SNF 2005-01-20 07:49:19: Low etch rate and "grass" on wafer
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