From emyers at snf.stanford.edu Mon May 2 10:38:29 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 2 May 2005 10:38:29 -0700 Subject: Problem stsetch2 SNF 2005-05-02 10:38:27: Loss a Wafer Message-ID: Wafer did not unload. Still in Chamber From eenriquez at snf.stanford.edu Mon May 2 12:49:29 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 2 May 2005 12:49:29 -0700 Subject: Problem stsetch2 SNF 2005-05-02 10:38:27: Loss a Wafer Message-ID: Removed dropped wafer in the chamber and adjusted the wafer lift pin speed. From amyers at snf.stanford.edu Tue May 3 10:55:25 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Tue, 3 May 2005 10:55:25 -0700 Subject: Shutdown stsetch2 SNF 2005-05-03 10:55:25: wafer shattered during pumpdown Message-ID: I hit stop on the tool, but the transport continued. It placed the backing wafer in the chamber with the pieces. From cbaxter at snf.stanford.edu Tue May 3 21:42:55 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 May 2005 21:42:55 -0700 Subject: Shutdown stsetch2 SNF 2005-05-03 10:55:25: wafer shattered during pumpdown Message-ID: vented chamber and removed wafer and carrier. delete phantom wafer on chamber. From amyers at snf.stanford.edu Thu May 5 11:58:55 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Thu, 5 May 2005 11:58:55 -0700 Subject: Shutdown stsetch2 SNF 2005-05-05 11:58:55: wafer is somewhere in the chamber Message-ID: I can't see it with the weak battery flashlight. Hopefully its not broken. It was two wafers stuck together with resist. Please return to the box I left by the tool. I'll clean the backside with acetone and try again tonight. From emyers at snf.stanford.edu Thu May 5 13:12:51 2005 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 5 May 2005 13:12:51 -0700 Subject: Shutdown stsetch2 SNF 2005-05-05 11:58:55: wafer is somewhere in the chamber Message-ID: Clearing Shutdown per Alan From eenriquez at snf.stanford.edu Thu May 5 16:08:03 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 May 2005 16:08:03 -0700 Subject: Shutdown stsetch2 SNF 2005-05-05 16:08:03: Broken wafer Message-ID: Bonded wafer popped off and was smashed by the gate valve. Removed wafer pieces. Still need to clean the gate From cbaxter at snf.stanford.edu Thu May 5 20:08:13 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 5 May 2005 20:08:13 -0700 Subject: Shutdown stsetch2 SNF 2005-05-05 16:08:03: Broken wafer Message-ID: cleaned up wafer chips on vat valve sealing surface and also wiped down load lock. From amyers at snf.stanford.edu Thu May 5 20:32:10 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Thu, 5 May 2005 20:32:10 -0700 Subject: Shutdown stsetch2 SNF 2005-05-05 20:32:09: loadlock is not pumping. valve not opened Message-ID: From eenriquez at snf.stanford.edu Fri May 6 15:56:09 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 May 2005 15:56:09 -0700 Subject: Shutdown stsetch2 SNF 2005-05-05 20:32:09: loadlock is not pumping. valve not opened Message-ID: Reset the heaters From eenriquez at snf.stanford.edu Mon May 9 16:45:31 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 9 May 2005 16:45:31 -0700 Subject: Comment stsetch2 SNF 2005-05-09 16:45:30: High chamber leak rate Message-ID: Vendor rebuilt the pin assembly. Chamber leak rate is about 6 mT/min. From eenriquez at snf.stanford.edu Wed May 11 08:36:50 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 May 2005 08:36:50 -0700 Subject: Comment stsetch2 SNF 2005-05-09 16:45:30: High chamber leak rate Message-ID: STS rebuilt the platten assembly From amyers at snf.stanford.edu Wed May 11 16:59:57 2005 From: amyers at snf.stanford.edu (amyers at snf.stanford.edu) Date: Wed, 11 May 2005 16:59:57 -0700 Subject: Shutdown stsetch2 SNF 2005-05-11 16:59:56: wafer slide off the chuck Message-ID: needs to be centered From cbaxter at snf.stanford.edu Wed May 11 19:24:53 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 May 2005 19:24:53 -0700 Subject: Shutdown stsetch2 SNF 2005-05-11 16:59:56: wafer slide off the chuck Message-ID: wafer bonded on carrier came off. vented chamber and removed wafer on load and chamber..