Shutdown stsetch2 SNF 2005-05-05 11:58:55: wafer is somewhere in the chamber

amyers at snf.stanford.edu amyers at snf.stanford.edu
Thu May 5 11:58:55 PDT 2005


I can't see it with the weak battery flashlight.  Hopefully its not broken.  It was two wafers stuck together with resist.  Please return to the box I left by the tool.  I'll clean the backside with acetone and try again tonight.




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