Shutdown stsetch2 SNF 2005-05-05 11:58:55: wafer is somewhere in the chamber
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Thu May 5 13:12:51 PDT 2005
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Shutdown stsetch2 SNF 2005-05-05 11:58:55: wafer is somewhere in the chamber
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Clearing Shutdown per Alan
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Shutdown stsetch2 SNF 2005-05-05 11:58:55: wafer is somewhere in the chamber
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Shutdown stsetch2 SNF 2005-05-05 16:08:03: Broken wafer
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