Shutdown stsetch2 SNF 2005-05-11 16:59:56: wafer slide off the chuck
amyers at snf.stanford.edu
amyers at snf.stanford.edu
Wed May 11 16:59:57 PDT 2005
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Comment stsetch2 SNF 2005-05-09 16:45:30: High chamber leak rate
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Shutdown stsetch2 SNF 2005-05-11 16:59:56: wafer slide off the chuck
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needs to be centered
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Comment stsetch2 SNF 2005-05-09 16:45:30: High chamber leak rate
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Shutdown stsetch2 SNF 2005-05-11 16:59:56: wafer slide off the chuck
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