From jasmine at snf.stanford.edu Tue Nov 1 17:54:52 2005 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Tue, 1 Nov 2005 17:54:52 -0800 Subject: Problem stsetch2 SNF 2005-11-01 17:54:51: table sensor fault Message-ID: cannot get my wafer out due to sensor problem with the carousel..stupid machine! From eenriquez at snf.stanford.edu Wed Nov 2 08:57:23 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Nov 2005 08:57:23 -0800 Subject: Problem stsetch2 SNF 2005-11-01 17:54:51: table sensor fault Message-ID: User error. The system needs to be enabled when operating the tool. From xzhuan1 at snf.stanford.edu Wed Nov 16 18:02:36 2005 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Wed, 16 Nov 2005 18:02:36 -0800 Subject: Problem stsetch2 SNF 2005-11-16 18:02:35: wafer stuck in etch chamber Message-ID: Software won't allow me to unload wafer. From cbaxter at snf.stanford.edu Wed Nov 16 21:02:07 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 16 Nov 2005 21:02:07 -0800 Subject: Problem stsetch2 SNF 2005-11-16 18:02:35: wafer stuck in etch chamber Message-ID: eric and i reboot the pc and unload wafer from the chamber. From wessmith at snf.stanford.edu Wed Nov 23 11:15:21 2005 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Wed, 23 Nov 2005 11:15:21 -0800 Subject: Shutdown stsetch2 SNF 2005-11-23 11:15:21: Wafer stuck in chamber after errors Message-ID: Received leak test failure and wafer not clamped red alarms. Was unable to retrieve wafer from chamber. Errors were cleared from alarm screen after I pressed ABORT From eenriquez at snf.stanford.edu Wed Nov 23 13:34:25 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Nov 2005 13:34:25 -0800 Subject: Shutdown stsetch2 SNF 2005-11-23 11:15:21: Wafer stuck in chamber after errors Message-ID: Process faulted for a high He leak rate. Ran a dummy wafer with no problems.