From eenriquez at snf.stanford.edu  Tue Oct 11 14:59:12 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 11 Oct 2005 14:59:12 -0700
Subject: Problem stsetch2 SNF 2005-09-29 16:34:50: condensation bottom left near floor
Message-ID: <mailman.41.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

Wiped off condensation.  Increased chiller temp to room temp.



From eenriquez at snf.stanford.edu  Tue Oct 11 15:00:43 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 11 Oct 2005 15:00:43 -0700
Subject: Shutdown stsetch2 SNF 2005-09-29 12:23:52: Roots blower not re-starting
Message-ID: <mailman.42.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

Installed rebuilt pump stack and re-started tool.  Ran maintenance O2 clean.  Cycled wafers.



From eenriquez at snf.stanford.edu  Tue Oct 11 15:02:30 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 11 Oct 2005 15:02:30 -0700
Subject: Problem stsetch2 SNF 2005-09-29 10:36:01: No power to monitor, machine cold
Message-ID: <mailman.43.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

Bad pump shutdown the system.  Installed re-built pump and re-started system.  Ran maintenance O2 plasma and cycled wafers.



From mislam at snf.stanford.edu  Sat Oct 15 12:43:32 2005
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Sat, 15 Oct 2005 12:43:32 -0700
Subject: Shutdown stsetch2 SNF 2005-10-15 12:43:32: Wafer Transfer error
Message-ID: <mailman.44.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

Wafer stuck in the chamber, screen shows wafer on the carosuel



From eenriquez at snf.stanford.edu  Mon Oct 17 16:06:27 2005
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 17 Oct 2005 16:06:27 -0700
Subject: Shutdown stsetch2 SNF 2005-10-15 12:43:32: Wafer Transfer error
Message-ID: <mailman.45.1356283383.4670.stsetch2-pcs@snf.stanford.edu>

Cleaned chamber. Ran O2 clean.  Cycled wafers.  Changed backside He tolerance recipe.