From me342f at snf.stanford.edu Thu Aug 3 04:33:47 2006 From: me342f at snf.stanford.edu (me342f at snf.stanford.edu) Date: Thu, 3 Aug 2006 04:33:47 -0700 Subject: Problem stsetch2 SNF 2006-08-03 04:33:46: wafer stuck in chamber Message-ID: transfer substrate command failed. red alarm: expected wafer not detected. critical SOI wafer stuck in chamber and needs to be removed. please place the wafer in the wafer carrier next to the computer. thanks. From eenriquez at snf.stanford.edu Thu Aug 3 08:56:43 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Aug 2006 08:56:43 -0700 Subject: Problem stsetch2 SNF 2006-08-03 04:33:46: wafer stuck in chamber Message-ID: Remove broken wafer and cleaned the chuck. Ran O2 clean recipe without any problems From me342c at snf.stanford.edu Thu Aug 3 23:14:48 2006 From: me342c at snf.stanford.edu (me342c at snf.stanford.edu) Date: Thu, 3 Aug 2006 23:14:48 -0700 Subject: Comment stsetch2 SNF 2006-08-03 23:14:47: recipe loader Message-ID: recipe loader is not working properly From me342c at snf.stanford.edu Thu Aug 3 23:15:44 2006 From: me342c at snf.stanford.edu (me342c at snf.stanford.edu) Date: Thu, 3 Aug 2006 23:15:44 -0700 Subject: Problem stsetch2 SNF 2006-08-03 23:15:44: recipe loader Message-ID: recipe loader is not working properly From eenriquez at snf.stanford.edu Fri Aug 4 07:36:11 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Aug 2006 07:36:11 -0700 Subject: Problem stsetch2 SNF 2006-08-03 23:15:44: recipe loader Message-ID: Rebooted the computer From eenriquez at snf.stanford.edu Fri Aug 4 07:36:34 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 4 Aug 2006 07:36:34 -0700 Subject: Comment stsetch2 SNF 2006-08-03 23:14:47: recipe loader Message-ID: Rebooted the computer and ran O2 clean. From ericp at snf.stanford.edu Sat Aug 5 23:53:41 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 5 Aug 2006 23:53:41 -0700 Subject: Problem stsetch2 SNF 2006-08-05 23:53:41: Piece of junk... Message-ID: I went to use this spaceheater called STSETCH2, and clicked on "RECIPE" and it is frozen in the state "Downloading config from database". I can click on Auto, manual, etc, but cannot get to the recipe while this message clogs the screen. This machine has never worked right since we got it. Can we send it back, or at least make it into a functional web browser? Also, the struts that are supposed to hold up the lid are non-functional. I know that it can't be from over usage! From emyers at snf.stanford.edu Mon Aug 7 10:54:19 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 7 Aug 2006 10:54:19 -0700 Subject: Problem stsetch2 SNF 2006-08-05 23:53:41: Piece of junk... Message-ID: The junk ran fine this morning. From yoonjin at snf.stanford.edu Thu Aug 10 22:53:59 2006 From: yoonjin at snf.stanford.edu (yoonjin at snf.stanford.edu) Date: Thu, 10 Aug 2006 22:53:59 -0700 Subject: Problem stsetch2 SNF 2006-08-10 22:53:59: alarm messege Message-ID: about pumping and tolerance. From me342d at snf.stanford.edu Mon Aug 14 01:53:46 2006 From: me342d at snf.stanford.edu (me342d at snf.stanford.edu) Date: Mon, 14 Aug 2006 01:53:46 -0700 Subject: Problem stsetch2 SNF 2006-08-14 01:53:45: wafer stuck in sts2 chamber Message-ID: Wafer is not processed yet. System initially gave a red error message saying it can't download the program. Retrying did not help either. Wafer wasn't returned. Then tried to rerun program and hoped it would bring out the stuck wafer but instead it gives a red transport error instead. From me342d at snf.stanford.edu Mon Aug 14 01:54:34 2006 From: me342d at snf.stanford.edu (me342d at snf.stanford.edu) Date: Mon, 14 Aug 2006 01:54:34 -0700 Subject: Shutdown stsetch2 SNF 2006-08-14 01:54:33: wafer stuck in sts2 chamber Message-ID: Wafer is not processed yet. System initially gave a red error message saying it can't download the program. Retrying did not help either. Wafer wasn't returned. Then tried to rerun program and hoped it would bring out the stuck wafer but instead it gives a red transport error instead. From emyers at snf.stanford.edu Mon Aug 14 09:55:23 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Aug 2006 09:55:23 -0700 Subject: Shutdown stsetch2 SNF 2006-08-14 01:54:33: wafer stuck in sts2 chamber Message-ID: Elmer retrived wafer, reset system. I ran a test and it looked OK. From emyers at snf.stanford.edu Mon Aug 14 09:56:17 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Aug 2006 09:56:17 -0700 Subject: Problem stsetch2 SNF 2006-08-14 01:53:45: wafer stuck in sts2 chamber Message-ID: Main computer needed reboot. Seems like the wrong unload progam was used when trying to retrieve the wafer. From emyers at snf.stanford.edu Mon Aug 14 09:57:03 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 14 Aug 2006 09:57:03 -0700 Subject: Problem stsetch2 SNF 2006-08-10 22:53:59: alarm messege Message-ID: System seems normal. A number of these errors are common. Incomplete detail on note to distinguish if there was a new problem. From gyama at snf.stanford.edu Wed Aug 16 12:22:08 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Wed, 16 Aug 2006 12:22:08 -0700 Subject: Problem stsetch2 SNF 2006-08-16 12:22:08: teflon on back of wafers, plasma off between Message-ID: etch & pass steps, severe undercut at resist/Si interface From fumin at snf.stanford.edu Wed Aug 16 22:56:05 2006 From: fumin at snf.stanford.edu (fumin at snf.stanford.edu) Date: Wed, 16 Aug 2006 22:56:05 -0700 Subject: Shutdown stsetch2 SNF 2006-08-16 22:56:04: wafer broken inside Message-ID: From cbaxter at snf.stanford.edu Thu Aug 17 00:45:46 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 17 Aug 2006 00:45:46 -0700 Subject: Shutdown stsetch2 SNF 2006-08-16 22:56:04: wafer broken inside Message-ID: Vented chamber and recovered broken wafer. Wiped down chamber with water and ipa. From cbaxter at snf.stanford.edu Thu Aug 17 00:48:52 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 17 Aug 2006 00:48:52 -0700 Subject: Problem stsetch2 SNF 2006-08-16 12:22:08: teflon on back of wafers, plasma off between Message-ID: Found broken wafer chips on top of the ceramic insulator that looks like is been on the chamber for sometime. From emyers at snf.stanford.edu Wed Aug 23 11:27:27 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 23 Aug 2006 11:27:27 -0700 Subject: Comment stsetch2 SNF 2006-08-23 11:27:26: Recipe Changes Message-ID: Changed the tune values for SOI and Smooth Shallow Template recipes to have lower reflected powers. Ran 15min. O2 clean. From fumin at snf.stanford.edu Sat Aug 26 02:58:38 2006 From: fumin at snf.stanford.edu (fumin at snf.stanford.edu) Date: Sat, 26 Aug 2006 02:58:38 -0700 Subject: Problem stsetch2 SNF 2006-08-26 02:58:37: cannot transfer wafer in the chamber Message-ID: From fumin at snf.stanford.edu Sat Aug 26 23:21:53 2006 From: fumin at snf.stanford.edu (fumin at snf.stanford.edu) Date: Sat, 26 Aug 2006 23:21:53 -0700 Subject: Comment stsetch2 SNF 2006-08-26 23:21:53: wafer has been unloaded and the system runs well Message-ID: From cbaxter at snf.stanford.edu Sun Aug 27 12:45:14 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 27 Aug 2006 12:45:14 -0700 Subject: Problem stsetch2 SNF 2006-08-26 02:58:37: cannot transfer wafer in the chamber Message-ID: I cycled the wafer in and out the chamber w/out problem. From cbaxter at snf.stanford.edu Sun Aug 27 12:45:22 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 27 Aug 2006 12:45:22 -0700 Subject: Comment stsetch2 SNF 2006-08-26 23:21:53: wafer has been unloaded and the system runs well Message-ID: From emyers at snf.stanford.edu Mon Aug 28 09:58:47 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 28 Aug 2006 09:58:47 -0700 Subject: Problem stsetch2 SNF 2006-08-28 09:58:47: Clamping Needs Adjustment Message-ID: The wafer is not centered during etch. Still usable, but needs to be aligned. From emyers at snf.stanford.edu Tue Aug 29 09:29:36 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 29 Aug 2006 09:29:36 -0700 Subject: Shutdown stsetch2 SNF 2006-08-29 09:29:35: Pumps Need Restart Message-ID: Pumps need to cool before restart following cooling water loss. From cbaxter at snf.stanford.edu Tue Aug 29 10:07:44 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 Aug 2006 10:07:44 -0700 Subject: Shutdown stsetch2 SNF 2006-08-29 09:29:35: Pumps Need Restart Message-ID: Turbo and backing pump is back up.. From gyama at snf.stanford.edu Tue Aug 29 14:43:21 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 29 Aug 2006 14:43:21 -0700 Subject: Problem stsetch2 SNF 2006-08-29 14:43:20: SOI template, plasma off for 2 seconds Message-ID: between etch & dep. Not tuning quickly to reach 3000W etching power. Etch is 3.0 sec, dep is 2.0 seconds From eenriquez at snf.stanford.edu Wed Aug 30 11:45:54 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 Aug 2006 11:45:54 -0700 Subject: Shutdown stsetch2 SNF 2006-08-30 11:45:54: Coil Chiller fault Message-ID: The Affinity coil chiller has its fault indicator light on. From cbaxter at snf.stanford.edu Wed Aug 30 13:32:35 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 30 Aug 2006 13:32:35 -0700 Subject: Shutdown stsetch2 SNF 2006-08-30 11:45:54: Coil Chiller fault Message-ID: Reset overtemp switch on chiller#1 From cbaxter at snf.stanford.edu Wed Aug 30 13:32:43 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 30 Aug 2006 13:32:43 -0700 Subject: Problem stsetch2 SNF 2006-08-29 14:43:20: SOI template, plasma off for 2 seconds Message-ID: From cbaxter at snf.stanford.edu Wed Aug 30 13:33:38 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 30 Aug 2006 13:33:38 -0700 Subject: Problem stsetch2 SNF 2006-08-28 09:58:47: Clamping Needs Adjustment Message-ID: Elmer and I adjusted laser on load arm and verified clamping shadow.