Problem stsetch2 SNF 2006-08-03 04:33:46: wafer stuck in chamber

me342f at me342f at
Thu Aug 3 04:33:47 PDT 2006

transfer substrate command failed.  red alarm: expected wafer not detected.  critical SOI wafer stuck in chamber and needs to be removed.  please place the wafer in the wafer carrier next to the computer. thanks.

More information about the stsetch2-pcs mailing list