Problem stsetch2 SNF 2006-08-03 04:33:46: wafer stuck in chamber

me342f at snf.stanford.edu me342f at snf.stanford.edu
Thu Aug 3 04:33:47 PDT 2006


transfer substrate command failed.  red alarm: expected wafer not detected.  critical SOI wafer stuck in chamber and needs to be removed.  please place the wafer in the wafer carrier next to the computer. thanks.




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