Shutdown stsetch2 SNF 2006-08-14 01:54:33: wafer stuck in sts2 chamber

me342d at snf.stanford.edu me342d at snf.stanford.edu
Mon Aug 14 01:54:34 PDT 2006


Wafer is not processed yet. System initially gave a red error message saying it can't download the program. Retrying did not help either. Wafer wasn't returned. Then tried to rerun program and hoped it would bring out the stuck wafer but instead it gives a red transport error instead. 




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