Shutdown stsetch2 SNF 2006-08-16 22:56:04: wafer broken inside
fumin at snf.stanford.edu
fumin at snf.stanford.edu
Wed Aug 16 22:56:05 PDT 2006
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Problem stsetch2 SNF 2006-08-16 12:22:08: teflon on back of wafers, plasma off between
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Shutdown stsetch2 SNF 2006-08-16 22:56:04: wafer broken inside
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