Problem stsetch2 SNF 2006-08-16 12:22:08: teflon on back of wafers, plasma off between

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Aug 17 00:48:52 PDT 2006


Found broken wafer chips on top of the ceramic insulator
that looks like is been on the chamber for sometime.




More information about the stsetch2-pcs mailing list