Comment stsetch2 SNF 2006-08-26 23:21:53: wafer has been unloaded and the system runs well
fumin at snf.stanford.edu
fumin at snf.stanford.edu
Sat Aug 26 23:21:53 PDT 2006
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Problem stsetch2 SNF 2006-08-26 02:58:37: cannot transfer wafer in the chamber
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Comment stsetch2 SNF 2006-08-26 23:21:53: wafer has been unloaded and the system runs well
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Comment stsetch2 SNF 2006-08-26 23:21:53: wafer has been unloaded and the system runs well
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