Problem stsetch2 SNF 2006-08-29 14:43:20: SOI template, plasma off for 2 seconds

gyama at snf.stanford.edu gyama at snf.stanford.edu
Tue Aug 29 14:43:21 PDT 2006


between etch & dep.  Not tuning quickly to reach 3000W etching power.  Etch is 3.0 sec, dep is 2.0 seconds




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