August 2006 Archives by author

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Starting: Thu Aug 3 04:33:47 PDT 2006
Ending: Wed Aug 30 13:33:38 PDT 2006
Messages: 31

• Shutdown stsetch2 SNF 2006-08-16 22:56:04: wafer broken inside   cbaxter at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-16 12:22:08: teflon on back of wafers, plasma off between   cbaxter at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-26 02:58:37: cannot transfer wafer in the chamber   cbaxter at snf.stanford.edu
• Comment stsetch2 SNF 2006-08-26 23:21:53: wafer has been unloaded and the system runs well   cbaxter at snf.stanford.edu
• Shutdown stsetch2 SNF 2006-08-29 09:29:35: Pumps Need Restart   cbaxter at snf.stanford.edu
• Shutdown stsetch2 SNF 2006-08-30 11:45:54: Coil Chiller fault   cbaxter at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-29 14:43:20: SOI template, plasma off for 2 seconds   cbaxter at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-28 09:58:47: Clamping Needs Adjustment   cbaxter at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-03 04:33:46: wafer stuck in chamber   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-03 23:15:44: recipe loader   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2006-08-03 23:14:47: recipe loader   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2006-08-30 11:45:54: Coil Chiller fault   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-05 23:53:41: Piece of junk...   emyers at snf.stanford.edu
• Shutdown stsetch2 SNF 2006-08-14 01:54:33: wafer stuck in sts2 chamber   emyers at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-14 01:53:45: wafer stuck in sts2 chamber   emyers at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-10 22:53:59: alarm messege   emyers at snf.stanford.edu
• Comment stsetch2 SNF 2006-08-23 11:27:26: Recipe Changes   emyers at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-28 09:58:47: Clamping Needs Adjustment   emyers at snf.stanford.edu
• Shutdown stsetch2 SNF 2006-08-29 09:29:35: Pumps Need Restart   emyers at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-05 23:53:41: Piece of junk...   ericp at snf.stanford.edu
• Shutdown stsetch2 SNF 2006-08-16 22:56:04: wafer broken inside   fumin at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-26 02:58:37: cannot transfer wafer in the chamber   fumin at snf.stanford.edu
• Comment stsetch2 SNF 2006-08-26 23:21:53: wafer has been unloaded and the system runs well   fumin at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-16 12:22:08: teflon on back of wafers, plasma off between   gyama at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-29 14:43:20: SOI template, plasma off for 2 seconds   gyama at snf.stanford.edu
• Comment stsetch2 SNF 2006-08-03 23:14:47: recipe loader   me342c at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-03 23:15:44: recipe loader   me342c at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-14 01:53:45: wafer stuck in sts2 chamber   me342d at snf.stanford.edu
• Shutdown stsetch2 SNF 2006-08-14 01:54:33: wafer stuck in sts2 chamber   me342d at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-03 04:33:46: wafer stuck in chamber   me342f at snf.stanford.edu
• Problem stsetch2 SNF 2006-08-10 22:53:59: alarm messege   yoonjin at snf.stanford.edu

Last message date: Wed Aug 30 13:33:38 PDT 2006
Archived on: Sun Dec 23 09:23:16 PST 2012

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