From eenriquez at snf.stanford.edu Fri Dec 1 08:40:42 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Dec 2006 08:40:42 -0800 Subject: Problem stsetch2 SNF 2006-11-30 18:24:20: dosn't sedem to recognize that carousel lid is down when it is down Message-ID: No problem found. From gyama at snf.stanford.edu Thu Dec 7 14:37:49 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 7 Dec 2006 14:37:49 -0800 Subject: Problem stsetch2 SNF 2006-12-07 14:37:49: red fault, can't detect table location Message-ID: From cbaxter at snf.stanford.edu Thu Dec 7 15:31:25 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Dec 2006 15:31:25 -0800 Subject: Problem stsetch2 SNF 2006-12-07 14:37:49: red fault, can't detect table location Message-ID: Able cleared alarm From huangzb at snf.stanford.edu Thu Dec 7 19:53:20 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 7 Dec 2006 19:53:20 -0800 Subject: Problem stsetch2 SNF 2006-12-07 19:53:19: transfering operation in process Message-ID: Always give transfering operation in process fault . Cannot vent or pump. Reboot the computer but do not know the password for login to windows and sts2 control software. From emyers at snf.stanford.edu Fri Dec 8 10:38:55 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 8 Dec 2006 10:38:55 -0800 Subject: Comment stsetch2 SNF 2006-12-08 10:38:55: Rebooting the Computer Message-ID: Please do not reboot the system computer. This will guarantee you won't get your wafers processed. The load lock configuration is lost and it takes maintenance to reset the configuration. From eenriquez at snf.stanford.edu Fri Dec 8 13:35:34 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 8 Dec 2006 13:35:34 -0800 Subject: Problem stsetch2 SNF 2006-12-07 19:53:19: transfering operation in process Message-ID: Found a defective CDA interlock switch. Temporarily jumpered out the interlock. Will repair on Monday. Should be safe to operate because it will use nitrogen in case of a total CDA loss. Cycle wafers and ran O2 clean with no problems. From kevhuang at snf.stanford.edu Fri Dec 8 15:56:00 2006 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Fri, 8 Dec 2006 15:56:00 -0800 Subject: Comment stsetch2 SNF 2006-12-08 15:55:59: O2 clean Message-ID: performed a 60 min. O2 clean because it was getting very difficult to tune for SOI recipe From kevhuang at snf.stanford.edu Sun Dec 10 14:36:15 2006 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Sun, 10 Dec 2006 14:36:15 -0800 Subject: Comment stsetch2 SNF 2006-12-10 14:36:14: SOI recipe can't tune correctly Message-ID: tried looking at the data log, the correct tuning point seems to be around 41% but no matter how high I raise the set point for tune, it can never reach that 41% position. Etch plasma always work for the first 2 seconds and the extinguishes for the last second of the etch. From kevhuang at snf.stanford.edu Sun Dec 10 14:52:33 2006 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Sun, 10 Dec 2006 14:52:33 -0800 Subject: Comment stsetch2 SNF 2006-12-10 14:52:32: running O2 clean Message-ID: From iwygant at snf.stanford.edu Thu Dec 14 03:22:56 2006 From: iwygant at snf.stanford.edu (iwygant at snf.stanford.edu) Date: Thu, 14 Dec 2006 03:22:56 -0800 Subject: Problem stsetch2 SNF 2006-12-14 03:22:56: Chamber heater errors Message-ID: I keep getting a "failed to stabilize heat/cool zone" error and "chamber heater fell below the warning level" warning. Looking at the sensors in the manual window, it looks like the machine is keeping the chamber at 100 deg, while the program wants it at 120 deg. From emyers at snf.stanford.edu Thu Dec 14 08:15:28 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 14 Dec 2006 08:15:28 -0800 Subject: Comment stsetch2 SNF 2006-11-28 13:50:13: Problem running MBC7 (jasmine recipe) Message-ID: Elmer was able to add second etch step by deleting and recoping second step. From emyers at snf.stanford.edu Thu Dec 14 08:15:41 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 14 Dec 2006 08:15:41 -0800 Subject: Comment stsetch2 SNF 2006-12-08 10:38:55: Rebooting the Computer Message-ID: Done From emyers at snf.stanford.edu Thu Dec 14 08:15:50 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 14 Dec 2006 08:15:50 -0800 Subject: Comment stsetch2 SNF 2006-12-08 15:55:59: O2 clean Message-ID: Done From emyers at snf.stanford.edu Thu Dec 14 08:16:09 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 14 Dec 2006 08:16:09 -0800 Subject: Comment stsetch2 SNF 2006-12-10 14:52:32: running O2 clean Message-ID: done From eenriquez at snf.stanford.edu Thu Dec 14 11:58:33 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 14 Dec 2006 11:58:33 -0800 Subject: Problem stsetch2 SNF 2006-12-14 03:22:56: Chamber heater errors Message-ID: Reseated tc connector. Also had wafer mapping errors. Adjusted table sensor. Ran O2 clean with no problems.