From eenriquez at snf.stanford.edu Sun Feb 5 09:57:44 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 5 Feb 2006 09:57:44 -0800 Subject: Shutdown stsetch2 SNF 2006-01-25 20:45:05: broken pump Message-ID: Installed rebuilt pump. Ran O2 clean with no problems. Enabled some manual operation under "operator" login. Now users can manually move wafer in and out of the chamber. Vent the chamber ONLY in the Auto screen. DO NOT vent it in the chamber MIMIC screen. This will vent the process chamber. From kevhuang at snf.stanford.edu Tue Feb 21 18:29:15 2006 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Tue, 21 Feb 2006 18:29:15 -0800 Subject: Shutdown stsetch2 SNF 2006-02-21 18:29:14: wafer stuck inside Message-ID: the stabilization step didn't complete and the machine aborted because it took too long to stabilize; then, wafer is stuck inside; please save the wafer From eenriquez at snf.stanford.edu Tue Feb 21 21:33:01 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Feb 2006 21:33:01 -0800 Subject: Shutdown stsetch2 SNF 2006-02-21 18:29:14: wafer stuck inside Message-ID: Unloaded wafer. Cycled dummy wafers through the system with no problems. User's wafer is in a single wafer holder on top of the test wafer boxes next to the system. From emyers at snf.stanford.edu Wed Feb 22 09:43:18 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 22 Feb 2006 09:43:18 -0800 Subject: Comment stsetch2 SNF 2006-01-23 15:07:55: Rebooted Computer Message-ID: From xzhuan1 at snf.stanford.edu Thu Feb 23 17:25:33 2006 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 23 Feb 2006 17:25:33 -0800 Subject: Shutdown stsetch2 SNF 2006-02-23 17:25:33: wafer broken in etch chamber Message-ID: Please rescue the pieces for me!! From eenriquez at snf.stanford.edu Thu Feb 23 22:02:35 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Feb 2006 22:02:35 -0800 Subject: Shutdown stsetch2 SNF 2006-02-23 17:25:33: wafer broken in etch chamber Message-ID: Wet cleaned the chamber and replaced the lip seal. Ran O2 maintenance clean. From emyers at snf.stanford.edu Tue Feb 28 16:54:45 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 28 Feb 2006 16:54:45 -0800 Subject: Problem stsetch2 SNF 2006-02-28 16:54:45: O2 Clean Message-ID: Vented chamber to remove wafer. Started O2 clean From emyers at snf.stanford.edu Tue Feb 28 16:55:10 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 28 Feb 2006 16:55:10 -0800 Subject: Problem stsetch2 SNF 2006-02-28 16:55:09: Gate Valve Message-ID: The gate valve air lines are leaking From eenriquez at snf.stanford.edu Tue Feb 28 23:38:52 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Feb 2006 23:38:52 -0800 Subject: Problem stsetch2 SNF 2006-02-28 16:55:09: Gate Valve Message-ID: Reset the loadlock computer. It was very confused. It tried to both open and close at the same time (air on both open and close). Ran "SmoothShal" with no problems From eenriquez at snf.stanford.edu Tue Feb 28 23:39:31 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 28 Feb 2006 23:39:31 -0800 Subject: Problem stsetch2 SNF 2006-02-28 16:54:45: O2 Clean Message-ID: thank you