Shutdown stsetch2 SNF 2006-01-25 20:45:05: broken pump

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Sun Feb 5 09:57:44 PST 2006


Installed rebuilt pump.  Ran O2 clean with no problems.
Enabled some manual operation under "operator" login.
Now users can manually move wafer in and out of the chamber.  Vent the chamber ONLY in the Auto screen.  DO NOT vent it in the chamber MIMIC screen.  This will vent the process chamber.




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