Shutdown stsetch2 SNF 2006-02-21 18:29:14: wafer stuck inside

kevhuang at snf.stanford.edu kevhuang at snf.stanford.edu
Tue Feb 21 18:29:15 PST 2006


the stabilization step didn't complete and the machine aborted because it took too long to stabilize; then, wafer is stuck inside; please save the wafer




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