Shutdown stsetch2 SNF 2006-02-21 18:29:14: wafer stuck inside

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Feb 21 21:33:01 PST 2006


Unloaded wafer.  Cycled dummy wafers through the system with no problems.  User's wafer is in a single wafer holder on top of the test wafer boxes next to the system.




More information about the stsetch2-pcs mailing list