Problem stsetch2 SNF 2006-02-28 16:54:45: O2 Clean
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Tue Feb 28 16:54:45 PST 2006
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Problem stsetch2 SNF 2006-02-28 16:54:45: O2 Clean
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Vented chamber to remove wafer. Started O2 clean
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Shutdown stsetch2 SNF 2006-02-23 17:25:33: wafer broken in etch chamber
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Problem stsetch2 SNF 2006-02-28 16:54:45: O2 Clean
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