From cbaxter at snf.stanford.edu Tue Jan 3 08:25:35 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Jan 2006 08:25:35 -0800 Subject: Problem stsetch2 SNF 2005-12-16 03:07:13: recipe start error Message-ID: system has been reboot and tested. From tag at snf.stanford.edu Thu Jan 5 00:57:37 2006 From: tag at snf.stanford.edu (tag at snf.stanford.edu) Date: Thu, 5 Jan 2006 00:57:37 -0800 Subject: Problem stsetch2 SNF 2006-01-05 00:57:36: Some pieces are inside. Message-ID: 300um wafer which was attached to 500um wafer by PR is partially broken. some pieces are remained in the chamber. From eenriquez at snf.stanford.edu Thu Jan 5 23:26:46 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Jan 2006 23:26:46 -0800 Subject: Problem stsetch2 SNF 2006-01-05 00:57:36: Some pieces are inside. Message-ID: Cleaned the chamber and ran o2 plasma clean. From emyers at snf.stanford.edu Mon Jan 9 09:39:49 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 9 Jan 2006 09:39:49 -0800 Subject: Comment stsetch2 SNF 2006-01-09 09:39:48: Rebooted Computer Message-ID: Rebooted due to slow software speed. From emyers at snf.stanford.edu Mon Jan 9 09:40:00 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 9 Jan 2006 09:40:00 -0800 Subject: Comment stsetch2 SNF 2006-01-09 09:39:48: Rebooted Computer Message-ID: From vipin at snf.stanford.edu Wed Jan 11 15:52:09 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Wed, 11 Jan 2006 15:52:09 -0800 Subject: Problem stsetch2 SNF 2006-01-11 15:52:08: problem Message-ID: Does not vent. Alarms after a while. error mesg: turbo pump valve not ok From cbaxter at snf.stanford.edu Wed Jan 11 16:19:40 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Jan 2006 16:19:40 -0800 Subject: Problem stsetch2 SNF 2006-01-11 15:52:08: problem Message-ID: changed pump control to remote and cleared alarm From leman at snf.stanford.edu Mon Jan 16 14:56:05 2006 From: leman at snf.stanford.edu (leman at snf.stanford.edu) Date: Mon, 16 Jan 2006 14:56:05 -0800 Subject: Problem stsetch2 SNF 2006-01-16 14:56:05: wafer stuck in chamber Message-ID: manual unload is disabled. please save my wafer! From eenriquez at snf.stanford.edu Tue Jan 17 22:31:01 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Jan 2006 22:31:01 -0800 Subject: Problem stsetch2 SNF 2006-01-16 14:56:05: wafer stuck in chamber Message-ID: The wafer was already out and sitting next to the monitor. Cycled a wafer with no problems. From vipin at snf.stanford.edu Tue Jan 17 23:53:27 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Tue, 17 Jan 2006 23:53:27 -0800 Subject: Problem stsetch2 SNF 2006-01-17 23:53:26: problem Message-ID: Wafer stuck in ICP. Manual unload is disabled. Need to retrieve the wafer. From cbaxter at snf.stanford.edu Wed Jan 18 09:34:51 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 18 Jan 2006 09:34:51 -0800 Subject: Problem stsetch2 SNF 2006-01-17 23:53:26: problem Message-ID: recovered wafer from chamber and run clean recipe. From vipin at snf.stanford.edu Wed Jan 18 11:57:00 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Wed, 18 Jan 2006 11:57:00 -0800 Subject: Problem stsetch2 SNF 2006-01-18 11:57:00: problem Message-ID: Keeps alrming. Stabilization setpoint not achieved. Stopping process flow. From cbaxter at snf.stanford.edu Wed Jan 18 12:42:53 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 18 Jan 2006 12:42:53 -0800 Subject: Problem stsetch2 SNF 2006-01-18 11:57:00: problem Message-ID: unload wafer from chamber. same problem earlier system lose communication, it does not communicate with icp chamber. reboot system. From emyers at snf.stanford.edu Mon Jan 23 15:07:55 2006 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 Jan 2006 15:07:55 -0800 Subject: Comment stsetch2 SNF 2006-01-23 15:07:55: Rebooted Computer Message-ID: From vipin at snf.stanford.edu Wed Jan 25 20:45:10 2006 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Wed, 25 Jan 2006 20:45:10 -0800 Subject: Shutdown stsetch2 SNF 2006-01-25 20:45:05: broken pump Message-ID: