Problem stsetch2 SNF 2006-01-16 14:56:05: wafer stuck in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jan 17 22:31:01 PST 2006


The wafer was already out and sitting next to the monitor.  Cycled a wafer with no problems.




More information about the stsetch2-pcs mailing list