From kupnik at snf.stanford.edu Fri Jul 7 22:02:53 2006 From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu) Date: Fri, 7 Jul 2006 22:02:53 -0700 Subject: Problem stsetch2 SNF 2006-07-07 22:02:52: problem Message-ID: could not load my wafer after 3 etch runs anymore From eenriquez at snf.stanford.edu Mon Jul 10 09:17:12 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Jul 2006 09:17:12 -0700 Subject: Problem stsetch2 SNF 2006-07-07 22:02:52: problem Message-ID: Rebooted the computer. Ran an O2 clean with no problems. From dwburns at snf.stanford.edu Thu Jul 13 07:52:28 2006 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Thu, 13 Jul 2006 07:52:28 -0700 Subject: Problem stsetch2 SNF 2006-07-13 07:52:28: Small Si debris on chuck Message-ID: There is some small silicon debris on the chuck and in the chamber. Please remove before next use. From eenriquez at snf.stanford.edu Thu Jul 13 09:09:54 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Jul 2006 09:09:54 -0700 Subject: Problem stsetch2 SNF 2006-07-13 07:52:28: Small Si debris on chuck Message-ID: User slightly over-etched his wafer. Cleaned up the chamber and ran O2 clean From bongsang at snf.stanford.edu Sat Jul 15 16:42:04 2006 From: bongsang at snf.stanford.edu (bongsang at snf.stanford.edu) Date: Sat, 15 Jul 2006 16:42:04 -0700 Subject: Problem stsetch2 SNF 2006-07-15 16:42:03: cannot remove the wafer Message-ID: cannot remove the wafer from the chamber. If someone can remove the wafer, plesae put the wafer in the box written Hotdog5 Box E which is in front of the monitor. Once it had red alarm during the process, I couldn't remove the wafer From dwburns at snf.stanford.edu Sun Jul 16 08:19:00 2006 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Sun, 16 Jul 2006 08:19:00 -0700 Subject: Problem stsetch2 SNF 2006-07-16 08:18:58: Backing pump controller issue Message-ID: System reports ICP1 backing pump controller warning message that comes back after being cleared. Unable to remove wafer. From eenriquez at snf.stanford.edu Mon Jul 17 09:28:07 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Jul 2006 09:28:07 -0700 Subject: Problem stsetch2 SNF 2006-07-16 08:18:58: Backing pump controller issue Message-ID: Reset the computer and unloaded the wafer. Ran O2 maintenance clean. From eenriquez at snf.stanford.edu Mon Jul 17 09:28:24 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Jul 2006 09:28:24 -0700 Subject: Problem stsetch2 SNF 2006-07-15 16:42:03: cannot remove the wafer Message-ID: Reset the computer and unloaded the wafer. Ran O2 maintenance clean. From clu at snf.stanford.edu Wed Jul 19 14:53:33 2006 From: clu at snf.stanford.edu (clu at snf.stanford.edu) Date: Wed, 19 Jul 2006 14:53:33 -0700 Subject: Shutdown stsetch2 SNF 2006-07-19 14:53:30: computer crashed Message-ID: From cbaxter at snf.stanford.edu Wed Jul 19 17:16:21 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 19 Jul 2006 17:16:21 -0700 Subject: Shutdown stsetch2 SNF 2006-07-19 14:53:30: computer crashed Message-ID: reboot system ... From me342f at snf.stanford.edu Wed Jul 26 12:13:48 2006 From: me342f at snf.stanford.edu (me342f at snf.stanford.edu) Date: Wed, 26 Jul 2006 12:13:48 -0700 Subject: Problem stsetch2 SNF 2006-07-26 12:13:48: chamber heat controller error Message-ID: the heat controller for the chamber wall could not adjust the temp to the setpoint and process fails repeatedly because the power will shut off after only a few seconds. From eenriquez at snf.stanford.edu Wed Jul 26 18:57:00 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Jul 2006 18:57:00 -0700 Subject: Problem stsetch2 SNF 2006-07-26 12:13:48: chamber heat controller error Message-ID: Replaced chamber TC. Ran test with no problems. From dwburns at snf.stanford.edu Thu Jul 27 04:25:09 2006 From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu) Date: Thu, 27 Jul 2006 04:25:09 -0700 Subject: Problem stsetch2 SNF 2006-07-27 04:25:08: Wafer Pieces in Chamber Message-ID: Sorry... Really need the older STS etcher. From eenriquez at snf.stanford.edu Thu Jul 27 10:45:24 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 27 Jul 2006 10:45:24 -0700 Subject: Problem stsetch2 SNF 2006-07-27 04:25:08: Wafer Pieces in Chamber Message-ID: Removed wafer pieces. Ran O2 clean.