Problem stsetch2 SNF 2006-07-15 16:42:03: cannot remove the wafer

bongsang at snf.stanford.edu bongsang at snf.stanford.edu
Sat Jul 15 16:42:04 PDT 2006


cannot remove the wafer from the chamber.
If someone can remove the wafer, plesae put the wafer in the box written Hotdog5 Box E which is in front of the monitor.
Once it had red alarm during the process, I couldn't remove the wafer




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