Problem stsetch2 SNF 2006-07-15 16:42:03: cannot remove the wafer

[bongsang at snf.stanford.edu]

cannot remove the wafer from the chamber.
If someone can remove the wafer, plesae put the wafer in the box written Hotdog5 Box E which is in front of the monitor.
Once it had red alarm during the process, I couldn't remove the wafer