Problem stsetch2 SNF 2006-07-26 12:13:48: chamber heat controller error
me342f at snf.stanford.edu
me342f at snf.stanford.edu
Wed Jul 26 12:13:48 PDT 2006
the heat controller for the chamber wall could not adjust the temp to the setpoint and process fails repeatedly because the power will shut off after only a few seconds.
More information about the stsetch2-pcs
mailing list