Problem stsetch2 SNF 2006-07-26 12:13:48: chamber heat controller error

me342f at snf.stanford.edu me342f at snf.stanford.edu
Wed Jul 26 12:13:48 PDT 2006


the heat controller for the chamber wall could not adjust the temp to the setpoint and process fails repeatedly because the power will shut off after only a few seconds.




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