Problem stsetch2 SNF 2006-07-27 04:25:08: Wafer Pieces in Chamber
dwburns at snf.stanford.edu
dwburns at snf.stanford.edu
Thu Jul 27 04:25:09 PDT 2006
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Problem stsetch2 SNF 2006-07-26 12:13:48: chamber heat controller error
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Problem stsetch2 SNF 2006-07-27 04:25:08: Wafer Pieces in Chamber
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Sorry... Really need the older STS etcher.
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Problem stsetch2 SNF 2006-07-26 12:13:48: chamber heat controller error
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Problem stsetch2 SNF 2006-07-27 04:25:08: Wafer Pieces in Chamber
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