From gyama at snf.stanford.edu Fri Jun 2 16:06:57 2006 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Fri, 2 Jun 2006 16:06:57 -0700 Subject: Problem stsetch2 SNF 2006-06-02 16:06:56: not loading wafer, memory buffer filling Message-ID: From eenriquez at snf.stanford.edu Sun Jun 4 08:41:41 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 4 Jun 2006 08:41:41 -0700 Subject: Problem stsetch2 SNF 2006-06-02 16:06:56: not loading wafer, memory buffer filling Message-ID: Reset the computer. From eenriquez at snf.stanford.edu Thu Jun 22 14:26:40 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Jun 2006 14:26:40 -0700 Subject: Shutdown stsetch2 SNF 2006-06-22 14:26:39: Lost communication with loadlock controller Message-ID: From eenriquez at snf.stanford.edu Fri Jun 23 08:44:32 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Jun 2006 08:44:32 -0700 Subject: Shutdown stsetch2 SNF 2006-06-22 14:26:39: Lost communication with loadlock controller Message-ID: Reset the computer. Cycled a wafer through the system with no problems. From clu at snf.stanford.edu Fri Jun 23 16:12:18 2006 From: clu at snf.stanford.edu (clu at snf.stanford.edu) Date: Fri, 23 Jun 2006 16:12:18 -0700 Subject: Problem stsetch2 SNF 2006-06-23 16:12:18: possible leak from lip seal Message-ID: ran the smooth shallow template program for 60 minutes on a wafer with 10 microns of resist, resulting wafer had burned resist around the edges. Showed the sample to Nancy Latta and she said that from the burned edges and the backside etching it looks like there is a leak from the lip seal. From rmelamud at snf.stanford.edu Fri Jun 23 17:12:00 2006 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Fri, 23 Jun 2006 17:12:00 -0700 Subject: Problem stsetch2 SNF 2006-06-23 17:11:59: backside gas pressure fault Message-ID: Ran a test wafer with Maintanance O2 clean recipe. Got the following error: "Backside gass pressure feel below alarm level defined in tolerance recipe" I aborted the process but don't know how to get wafer out. Wafer is still inside the chamber. From eenriquez at snf.stanford.edu Mon Jun 26 08:20:10 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Jun 2006 08:20:10 -0700 Subject: Problem stsetch2 SNF 2006-06-23 17:11:59: backside gas pressure fault Message-ID: Manually moved out wafer from chamber. The recipe was using the wrong tolerance template. From eenriquez at snf.stanford.edu Mon Jun 26 08:23:58 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Jun 2006 08:23:58 -0700 Subject: Problem stsetch2 SNF 2006-06-23 16:12:18: possible leak from lip seal Message-ID: Ran 3 wafers, the He leak rates were very good; they ranged from 9 to 14 sccm/min. From huangzb at snf.stanford.edu Thu Jun 29 22:50:38 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 29 Jun 2006 22:50:38 -0700 Subject: Problem stsetch2 SNF 2006-06-29 22:50:38: The transport handler did not work Message-ID: From eenriquez at snf.stanford.edu Fri Jun 30 09:18:53 2006 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Jun 2006 09:18:53 -0700 Subject: Problem stsetch2 SNF 2006-06-29 22:50:38: The transport handler did not work Message-ID: No problem found. Cycled wafers through the system with no problems.